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Low temperature preparation of transparent, antireflective TiO2 films deposited at different O-2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering 期刊论文
Vacuum, 2012, 卷号: 86, 期号: 9, 页码: 1387-1392
Authors:  Du W(杜雯);  Ye YP(冶银平);  Li HX(李红轩);  Zhao F(赵飞);  Ji L(吉利);  Quan WL(权伟龙);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(978Kb)  |  Favorite  |  View/Download：415/4  |  Submit date：2013/07/12
Titanium Oxide Thin Film  Mw-ecr  O-2/ar Ratio  Antireflection  
射频功率对类金刚石薄膜结构和性能的影响 期刊论文
物理学报, 2005, 卷号: 54, 期号: 4, 页码: 1885-1889
Authors:  李红轩;  徐洮;  陈建敏;  周惠娣;  刘惠文
Adobe PDF(291Kb)  |  Favorite  |  View/Download：121/1  |  Submit date：2014/03/03
等离子增强化学气相沉积  类金刚石薄膜  射频功率  结构和性能  Plasma-enhanced Chemical Vapor Deposition  Diamond-like Carbon Films  Rf Power  Structure And Properties