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The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles 期刊论文
Surface & Coatings Technology, 2012, 卷号: 206, 期号: 19-20, 页码: 3961-3969
Authors:  Lv YH(吕艳红);  Ji L(吉利);  Liu XH(刘晓红);  Li HX(李红轩);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Li HX(李红轩)
Adobe PDF(1880Kb)  |  Favorite  |  View/Download：752/1  |  Submit date：2013/07/12
Craln Films  Microstructure Hardness  Thermal Stability  
Low temperature preparation of transparent, antireflective TiO2 films deposited at different O-2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering 期刊论文
Vacuum, 2012, 卷号: 86, 期号: 9, 页码: 1387-1392
Authors:  Du W(杜雯);  Ye YP(冶银平);  Li HX(李红轩);  Zhao F(赵飞);  Ji L(吉利);  Quan WL(权伟龙);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(978Kb)  |  Favorite  |  View/Download：416/4  |  Submit date：2013/07/12
Titanium Oxide Thin Film  Mw-ecr  O-2/ar Ratio  Antireflection