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Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering 期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Ye YP(冶银平)
Adobe PDF(817Kb)  |  Favorite  |  View/Download：421/3  |  Submit date：2013/12/05
Magnetron Sputtering  A-c:h Film  Vacuum Annealing  Microstructure  Tribological Behavior  
Low temperature preparation of transparent, antireflective TiO2 films deposited at different O-2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering 期刊论文
Vacuum, 2012, 卷号: 86, 期号: 9, 页码: 1387-1392
Authors:  Du W(杜雯);  Ye YP(冶银平);  Li HX(李红轩);  Zhao F(赵飞);  Ji L(吉利);  Quan WL(权伟龙);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(978Kb)  |  Favorite  |  View/Download：415/4  |  Submit date：2013/07/12
Titanium Oxide Thin Film  Mw-ecr  O-2/ar Ratio  Antireflection