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非平衡磁控溅射制备类石墨碳膜及性能研究 期刊论文
物理学报, 2012, 卷号: 61, 期号: 5, 页码: 056103(1-7)
Authors:  王永军;  李红轩;  吉利;  刘晓红;  吴艳霞;  周惠娣;  陈建敏
Adobe PDF(577Kb)  |  Favorite  |  View/Download:298/0  |  Submit date:2013/07/12
磁控溅射  类石墨碳膜  微观结构  性能  Magnetron Sputtering  Graphite-like Carbon Film  Microstructure  Performance  
Influence of substrate bias voltage on the microstructure and residual stress of CrN films deposited by medium frequency magnetron sputtering 期刊论文
Materials Science and Engineering B, 2011, 卷号: 176, 页码: 850-854
Authors:  Gong QH(巩清华);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(519Kb)  |  Favorite  |  View/Download:295/3  |  Submit date:2012/09/24
Crn FIlms  Medium Frequency Magnetron Sputterin  Substrate Bias Voltage  Microstructure  Residual Stress  
退火温度对 a-C:H 膜结构及摩擦学性能的影响 期刊论文
无机材料学报, 2011, 卷号: 26, 期号: 2, 页码: 209-214
Authors:  王永霞;  冶银平;  李红轩;  吉利;  陈建敏;  周惠娣
Adobe PDF(941Kb)  |  Favorite  |  View/Download:301/1  |  Submit date:2012/09/24
A-c:h 膜  退火温度  结构  摩擦学性能  A-c:h Film  Annealing Temperature  Structure  Tribological Property  
射频功率对类金刚石薄膜结构和性能的影响 期刊论文
物理学报, 2005, 卷号: 54, 期号: 4, 页码: 1885-1889
Authors:  李红轩;  徐洮;  陈建敏;  周惠娣;  刘惠文
Adobe PDF(291Kb)  |  Favorite  |  View/Download:122/1  |  Submit date:2014/03/03
等离子增强化学气相沉积  类金刚石薄膜  射频功率  结构和性能  Plasma-enhanced Chemical Vapor Deposition  Diamond-like Carbon Films  Rf Power  Structure And Properties