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The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation 期刊论文
Sensors and Actuators B, 2011, 卷号: 160, 页码: 1499-1503
Authors:  Chen JT(陈江涛);  Yan XB(阎兴斌);  Liu WW(刘文文);  Xue QJ(薛群基)
Adobe PDF(1143Kb)  |  Favorite  |  View/Download：508/0  |  Submit date：2012/09/24
Zno FIlm  Ion implantatIon  Magnetron Sputtering  Ethanol Gas Sensor