| The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation | |
| Department | 固体润滑国家重点实验室 |
Chen JT(陈江涛) ; Yan XB(阎兴斌); Liu WW(刘文文); Xue QJ(薛群基)
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| 2011 | |
| Source Publication | Sensors and Actuators B
 |
| ISSN | 0925-4005 |
| Volume | 160Pages:1499-1503 |
| Abstract | The authors present the gas sensors using magnetron sputtered ZnO films modified by Ag ion implan- tation. The results indicate the sensing response of ZnO films is improved by Ag ion implantation, and the sensing response increases with the Ag ion implantation doses. The possible reason of the improved sensing property is that the metallic Ag distributed on the nanograins of implanted ZnO films enhances chemical adsorption and promote catalytic reaction at the surface. However, after long-time conservation, obvious response deterioration for the Ag ion implanted ZnO sensor took place. |
| Keyword | Zno FIlm Ion implantatIon Magnetron Sputtering Ethanol Gas Sensor |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the Top Hundred Talents Program of Chinese Academy of Sciences |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 低维材料摩擦学组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/810 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Yan XB(阎兴斌) |
| Recommended Citation GB/T 7714 | Chen JT,Yan XB,Liu WW,et al. The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation[J]. Sensors and Actuators B,2011,160:1499-1503. |
| APA | 陈江涛,阎兴斌,刘文文,&薛群基.(2011).The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation.Sensors and Actuators B,160,1499-1503. |
| MLA | 陈江涛,et al."The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation".Sensors and Actuators B 160(2011):1499-1503. |
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| 20111499-1503.PDF（1143KB） | 开放获取 | License | View Application Full Text | |||
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