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氮化铬硬质膜的制备及其性能研究 学位论文
: 中国科学院研究生院, 2011
Authors:  孔庆花
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Crnx薄膜  中频脉冲磁控溅射  工艺参数  微观结构  摩擦学性能  Crnx Films  Medium Frequency Pulse Magnetron Sputtering  Deposition Parameters  Microstructure  Tribological Properties  
Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering 期刊论文
Applied Surface Science, 2011, 卷号: 257, 期号: 无期, 页码: 2269-2274
Authors:  Kong QH(孔庆花);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(921Kb)  |  Favorite  |  View/Download：219/2  |  Submit date：2012/09/24
Crnx FIlms  Medium Frequency Magnetron Sputtering  N2 Content  Microstructure  Mechanical Properties  Tribological Properties  
Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films 期刊论文
Materials Science and Engineering A, 2007, 卷号: 460-461, 页码: 301-305
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张俊彦)
Adobe PDF(358Kb)  |  Favorite  |  View/Download：278/3  |  Submit date：2013/11/01
Twin Target Medium Frequency Magnetron Sputtering  Crnx Films  Deposition Rate  Structure  Wear Properties