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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Thin Solid... [1]
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空间润滑材料组 [1]
纳米润滑研究组 [1]
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the Nation... [1]
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刘维民 [1]
张俊彦 [1]
徐洮 [1]
王霞 [1]
王鹏 [1]
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英语 [1]
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2007 [1]
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Comparing internal stress in diamond-like carbon films with different structure
期刊论文
Thin Solid Films, 2007, 卷号: 515, 页码: 6899-6903
Authors:
Wang P(王鹏)
;
Wang X(王霞)
;
Xu T(徐洮)
;
Liu WM(刘维民)
;
Zhang JY(张俊彦)
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Submit date：2013/11/01
Dlc Films
Internal Stress
Ti-interlayer
Ti-doping
Functional Gradient
