LICP OpenIR  > 固体润滑国家重点实验室(LSL)
Comparing internal stress in diamond-like carbon films with different structure
Department固体润滑国家重点实验室
Wang P(王鹏); Wang X(王霞); Xu T(徐洮); Liu WM(刘维民); Zhang JY(张俊彦)
2007
Source PublicationThin Solid Films
ISSN0040-6090
Volume515Pages:6899-6903
AbstractDiamond-like carbon (DLC) films with different structures were deposited on Si (100) and stainless steel substrates in a hybrid deposition system with Ar and CH4 as the feedstocks. The effects of the bias voltage, Ti-interlayer, Ti functional gradient layer and Ti-doping on the internal stress in DLC films were investigated. The results show that the internal stress in DLC films arises from both the intrinsic stress generated during the film growth and the thermal stress generated due to the mismatching of the thermal expansion coefficient between the DLC films and the substrate materials. The intrinsic stress can be released through doping titanium element at the expense of reducing the sp3/sp2 ratio. The thermal stress in DLC films can be decreased through introducing Ti-interlayer or Ti functional gradient layer. Noticeably, DLC films with very low internal stress deposited on stainless steel can be obtained through the combination of Ti-doping and Ti functional gradient layer.
KeywordDlc Films Internal Stress Ti-interlayer Ti-doping Functional Gradient
Subject Area材料科学与物理化学
Funding Organizationthe National Natural Science Foundation of China (Granted No: 50323007);the Innovative Group Foundation from NSFC (Grant No. 50421502);973 Project (Grant No. 2007CB607601);the “Hundred Talents Program” of the Chinese Academy of Sciences
Indexed BySCI
Language英语
Funding Project空间润滑材料组 ; 纳米润滑研究组
Citation statistics
Cited Times:94[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/4010
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorLiu WM(刘维民); Zhang JY(张俊彦)
Recommended Citation
GB/T 7714
Wang P,Wang X,Xu T,et al. Comparing internal stress in diamond-like carbon films with different structure[J]. Thin Solid Films,2007,515:6899-6903.
APA 王鹏,王霞,徐洮,刘维民,&张俊彦.(2007).Comparing internal stress in diamond-like carbon films with different structure.Thin Solid Films,515,6899-6903.
MLA 王鹏,et al."Comparing internal stress in diamond-like carbon films with different structure".Thin Solid Films 515(2007):6899-6903.
Files in This Item:
File Name/Size DocType Version Access License
20076899-6903.pdf(213KB) 开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[王鹏]'s Articles
[王霞]'s Articles
[徐洮]'s Articles
Baidu academic
Similar articles in Baidu academic
[王鹏]'s Articles
[王霞]'s Articles
[徐洮]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[王鹏]'s Articles
[王霞]'s Articles
[徐洮]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 20076899-6903.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.