Comparing internal stress in diamond-like carbon films with different structure | |
Department | 固体润滑国家重点实验室 |
Wang P(王鹏); Wang X(王霞); Xu T(徐洮); Liu WM(刘维民); Zhang JY(张俊彦) | |
2007 | |
Source Publication | Thin Solid Films |
ISSN | 0040-6090 |
Volume | 515Pages:6899-6903 |
Abstract | Diamond-like carbon (DLC) films with different structures were deposited on Si (100) and stainless steel substrates in a hybrid deposition system with Ar and CH4 as the feedstocks. The effects of the bias voltage, Ti-interlayer, Ti functional gradient layer and Ti-doping on the internal stress in DLC films were investigated. The results show that the internal stress in DLC films arises from both the intrinsic stress generated during the film growth and the thermal stress generated due to the mismatching of the thermal expansion coefficient between the DLC films and the substrate materials. The intrinsic stress can be released through doping titanium element at the expense of reducing the sp3/sp2 ratio. The thermal stress in DLC films can be decreased through introducing Ti-interlayer or Ti functional gradient layer. Noticeably, DLC films with very low internal stress deposited on stainless steel can be obtained through the combination of Ti-doping and Ti functional gradient layer. |
Keyword | Dlc Films Internal Stress Ti-interlayer Ti-doping Functional Gradient |
Subject Area | 材料科学与物理化学 |
Funding Organization | the National Natural Science Foundation of China (Granted No: 50323007);the Innovative Group Foundation from NSFC (Grant No. 50421502);973 Project (Grant No. 2007CB607601);the “Hundred Talents Program” of the Chinese Academy of Sciences |
Indexed By | SCI |
Language | 英语 |
Funding Project | 空间润滑材料组 ; 纳米润滑研究组 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/4010 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Liu WM(刘维民); Zhang JY(张俊彦) |
Recommended Citation GB/T 7714 | Wang P,Wang X,Xu T,et al. Comparing internal stress in diamond-like carbon films with different structure[J]. Thin Solid Films,2007,515:6899-6903. |
APA | 王鹏,王霞,徐洮,刘维民,&张俊彦.(2007).Comparing internal stress in diamond-like carbon films with different structure.Thin Solid Films,515,6899-6903. |
MLA | 王鹏,et al."Comparing internal stress in diamond-like carbon films with different structure".Thin Solid Films 515(2007):6899-6903. |
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