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具高功率脉冲离子源的磁控溅射装置 专利
专利类型: 发明专利, 专利号: ZL201510708221.9, 申请日期: 2018-06-29,
Inventors:  张斌;  张俊彦;  高凯雄;  强力;  王健
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阳极场辅磁控溅射镀膜装置 专利
专利类型: 发明专利, 专利号: ZL201510704469.8, 申请日期: 2018-06-12,
Inventors:  张斌;  张俊彦;  高凯雄;  强力;  王健
Adobe PDF(89Kb)  |  Favorite  |  View/Download：41/0  |  Submit date：2018/11/27
Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating 期刊论文
Applied Surface Science, 2015, 卷号: 353, 期号: 无, 页码: 522-529
Authors:  Qiang L(强力);  Gao KX(高凯雄);  Zhang LF(张礼芳);  Wang, Jian;  Zhang B(张斌);  Zhang JY(张俊彦)
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W/ti-doped Dlc Film  Internal Stress  Mechanical Properties  Tribological Performance