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Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system 期刊论文
Surface and Interface Analysis, 2015, 卷号: 47, 期号: 2, 页码: 184-191
Authors:  Wu, Jinfeng;  He NR(何乃如);  Li HX(李红轩);  Liu XH(刘晓红);  Ji L(吉利);  Huang, Xiaopeng;  Chen JM(陈建敏)
Adobe PDF(3080Kb)  |  Favorite  |  View/Download：128/3  |  Submit date：2016/02/18
Hybrid Pvd Coating System  Tialsin Films  Microstructure  Mechanical Properties And Oxidation Resistance  
Ｎ2 流量对中频非平衡磁控溅射ＴｉＡｌＮ薄膜结构及性能的影响 期刊论文
功能材料, 2013, 卷号: 44, 期号: 1, 页码: 32-35
Authors:  吴劲峰;  何乃如;  邱孟柯;  吉利;  李红轩;  黄小鹏
Adobe PDF(880Kb)  |  Favorite  |  View/Download：305/3  |  Submit date：2013/12/10
磁控溅射  Tialn 薄膜  N2 流量  微观结构  硬度  Magnetron Sputtering  Tialn Films  Nitrogen Flow  Microstructure  Hardness