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The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering 期刊论文
Diamond & Related Materials, 2020, 期号: 109, 页码: 108018
Authors:  Pei LL(裴露露);  Ju PF(鞠鹏飞);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Xue DS(薛德胜);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(2891Kb)  |  Favorite  |  View/Download：62/0  |  Submit date：2020/12/03
Methane  Target poisoning  Fullerene-like nanostructure  Hydrogenated carbon films  Reactive magnetron sputtering