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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Diamond & ... [1]
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Guangan Zh... [1]
Lin Chen [1]
Minglan Zh... [1]
Xubing Wei [1]
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2020 [1]
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Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD
期刊论文
Diamond & Related Materials, 2020, 期号: 110, 页码: 108102
Authors:
Xubing Wei
;
Lin Chen
;
Minglan Zhang
;
Zhibin Lu
;
Guangan Zhang
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Submit date：2020/11/30
DLC films
Mechanical performance
Corrosion
Tribology
