LICP OpenIR  > 固体润滑国家重点实验室(LSL)
Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD
Department固体润滑国家重点实验室(LSL)
Xubing Wei1,2; Lin Chen1,2; Minglan Zhang1; Zhibin Lu1; Guangan Zhang1,2
The second department低维润滑材料研究组
2020
Source PublicationDiamond & Related Materials
Issue110Pages:108102
KeywordDLC films Mechanical performance Corrosion Tribology
If2.650
compositor第一作者单位
Citation statistics
Cited Times:33[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/26860
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorZhibin Lu; Guangan Zhang
Affiliation1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences
Recommended Citation
GB/T 7714
Xubing Wei,Lin Chen,Minglan Zhang,et al. Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD[J]. Diamond & Related Materials,2020(110):108102.
APA Xubing Wei,Lin Chen,Minglan Zhang,Zhibin Lu,&Guangan Zhang.(2020).Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD.Diamond & Related Materials(110),108102.
MLA Xubing Wei,et al."Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD".Diamond & Related Materials .110(2020):108102.
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