Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD | |
Department | 固体润滑国家重点实验室(LSL) |
Xubing Wei1,2; Lin Chen1,2; Minglan Zhang1; Zhibin Lu1; Guangan Zhang1,2 | |
The second department | 低维润滑材料研究组 |
2020 | |
Source Publication | Diamond & Related Materials |
Issue | 110Pages:108102 |
Keyword | DLC films Mechanical performance Corrosion Tribology |
If | 2.650 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/26860 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Zhibin Lu; Guangan Zhang |
Affiliation | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences |
Recommended Citation GB/T 7714 | Xubing Wei,Lin Chen,Minglan Zhang,et al. Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD[J]. Diamond & Related Materials,2020(110):108102. |
APA | Xubing Wei,Lin Chen,Minglan Zhang,Zhibin Lu,&Guangan Zhang.(2020).Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD.Diamond & Related Materials(110),108102. |
MLA | Xubing Wei,et al."Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD".Diamond & Related Materials .110(2020):108102. |
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15-Xubin Wei-Diamond(12819KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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