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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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Creator：乔丽
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Funding Organization：the National Natural Science Foundation of China (Grant No: 11475236)
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Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering
期刊论文
Journal of Nuclear Materials, 2017, 卷号: 485, 页码: 1-7
Authors:
Zhang, X. X.
;
Wu, Y. Z.
;
Mu, B.
;
Qiao L(乔丽)
;
Li, W. X.
;
Li, J. J.
;
Wang P(王鹏)
;
Wang P(王鹏)
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Submit date：2017/04/07
Magnetron Sputtering
Tungsten Sub-nitride
Thermal Stability
Structure
Annealing
Thermal Desorption Spectroscopy
