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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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摩擦学学报 [1]
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低维材料摩擦学组 [1]
纳米润滑研究组 [1]
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国家自然科学基金资助... [1]
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张俊彦 [1]
张广安 [1]
王霞 [1]
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Source Publication：摩擦学学报
Funding Project：低维材料摩擦学组
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中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究
期刊论文
摩擦学学报, 2008, 卷号: 28, 期号: 2, 页码: 118-122
Authors:
张广安
;
王鹏
;
陈友明
;
王霞
;
阎鹏勋
;
张俊彦
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Submit date：2013/03/28
中频磁控溅射
Al-dlc薄膜
摩擦磨损性能
Medium Frequency Magnetron Sputtering
Al-dlc Thin Films
Tribological Properties
