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Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass 期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:  Wang, Linqing;  Wang, Weiyan;  Huang, Jinhua;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(800Kb)  |  Favorite  |  View/Download：87/1  |  Submit date：2015/10/26
Mu C-si:h Thin Films  Magnetron Sputtering  Amorphous Incubation Layers  Low Temperature