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Properties of TiN/TiCN multilayer films by direct current magnetron sputtering 期刊论文
Journal of Physics D: Applied Physics, 2012, 卷号: 45, 期号: 9, 页码: 095303(1-9)
Authors:  Zheng JY(郑建云);  Hao JY(郝俊英);  Liu XQ(刘小强);  Liu WM(刘维民);  Hao JY(郝俊英)
Adobe PDF(1327Kb)  |  Favorite  |  View/Download：298/5  |  Submit date：2013/07/12
Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Zhang JY(张俊彦);  Liu WM(刘维民);  Liu WM(刘维民)
Adobe PDF(522Kb)  |  Favorite  |  View/Download：169/1  |  Submit date：2014/12/23