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Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering 期刊论文
Materials Science and Technology, 2011, 卷号: 27, 期号: 11, 页码: 1669-1673
Authors:  Liu XQ(刘小强);  Yang J(杨军);  Hao JY(郝俊英);  Liu WM(刘维民)
Adobe PDF(431Kb)  |  Favorite  |  View/Download:242/3  |  Submit date:2012/11/29
Amorphous Carbon Films  Titanium Carbide  Radio Frequency Sputtering  Nanostructure  Lubrication