| Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering | |
| Department | 固体润滑国家重点实验室 |
Liu XQ(刘小强) ; Yang J(杨军); Hao JY(郝俊英); Liu WM(刘维民)
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| 2011 | |
| Source Publication | Materials Science and Technology
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| ISSN | 0267-0836 |
| Volume | 27Issue:11Pages:1669-1673 |
| Abstract | Amorphous carbon films containing titanium carbide (nc-TiC/a-C:H) were deposited onto n-type silicon (100) by radio frequency reactive sputtering titanium target in an Ar–CH4 mixed atmosphere. The composition and microstructure of the films were characterised by means of X-ray photoelectron spectroscopy, field emitted SEM, XRD and Raman spectra. The mechanical and tribological properties of the films were measured by a nanoindentation tester and a ball-on- disc UMT–2MT tribometer. By adjusting the CH4 flowrate, Ti content in the films could be controlled, and a transition in structures of the films from loose polymer-like to glassy and dense nanostructure was observed. The density of coatings was improved by the introduction of TiC nanocrystalline particles. The mechanical and lubricious properties were different accordingly. |
| Keyword | Amorphous Carbon Films Titanium Carbide Radio Frequency Sputtering Nanostructure Lubrication |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (grant NO.50905177;NO.50823008);the National 973 Project of China (grant NO.2007CB607601);the Innovative Group Foundation from the National Natural Science Foundation of China (grant NO.50721062) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 高温抗磨材料组 ; 空间润滑材料组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2248 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Recommended Citation GB/T 7714 | Liu XQ,Yang J,Hao JY,et al. Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering[J]. Materials Science and Technology,2011,27(11):1669-1673. |
| APA | 刘小强,杨军,郝俊英,&刘维民.(2011).Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering.Materials Science and Technology,27(11),1669-1673. |
| MLA | 刘小强,et al."Microstructure and properties of nc-TiC/a-C : H films deposited by radio frequency reactive sputtering".Materials Science and Technology 27.11(2011):1669-1673. |
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| 20111669-1673.PDF（431KB） | 开放获取 | License | View Application Full Text | |||
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