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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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Surface an... [1]
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纳米润滑研究组 [1]
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He, Deyan [1]
Wang, Qi [1]
张俊彦 [1]
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In-situ stress suppression of hydrogenated a-CNx film prepared via Ar gas introduction
期刊论文
Surface and Interface Analysis, 2017, 卷号: 49, 期号: 5, 页码: 370-375
Authors:
Wang, Qi
;
He, Deyan
;
Zhang JY(张俊彦)
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Submit date：2017/05/10
Amorphous Carbon
Carbon Nitride Films
Stress
Raman
