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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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磨损与表面工程课题组 [1]
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王林青 [1]
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2014 [1]
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磁控溅射制备氢化硅薄膜及其特性研究
学位论文
: 中国科学院大学, 2014
Authors:
王林青
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Submit date：2014/11/25
氢化硅薄膜
磁控溅射
辅助离子束
磷掺杂
硼掺杂
Hydrogenated Si Thin Films
Magnetron Sputtering
Assisted Ion Beam
P-doping
B-doping
