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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Applied Su... [1]
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吴志国 [1]
张广安 [1]
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2007 [1]
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Language：英语
Source Publication：Applied Surface Science
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Structure evolution and mechanical properties enhancement of Al/AlN multilayer
期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 8835-8840
Authors:
Zhang GA(张广安)
;
Wu ZG(吴志国)
;
Wang MX(王明旭)
;
Fan XY(范晓彦)
;
Wang J(王君)
;
Yan PX(阎鹏勋)
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Submit date：2013/11/01
Magnetron Sputtering
Al/aln Multilayer
Structure
Hardness
Wear Properties
