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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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摩擦学学报 [1]
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空间润滑材料组 [1]
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国家自然科学基金(5... [1]
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刘小强 [1]
刘维民 [1]
郑建云 [1]
郝俊英 [1]
龚秋雨 [1]
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2013 [1]
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Source Publication：摩擦学学报
Funding Organization：国家自然科学基金(50905177)
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直流磁控溅射制备TiAlCN薄膜及其性能研究
期刊论文
摩擦学学报, 2013, 卷号: 33, 期号: 1, 页码: 85-90
Authors:
郑建云
;
郝俊英
;
刘小强
;
龚秋雨
;
刘维民
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Submit date：2013/12/18
直流磁控溅射
Tialcn薄膜
微观结构
硬度
摩擦行为
Direct Current Magnetron Sputtering
Tialcn Films
Microstructure
Hardness
Tribological Behaviours
