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Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Zhang JY(张俊彦);  Liu WM(刘维民);  Liu WM(刘维民)
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Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
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Carbon Nitride Films  Pecvd  Composition  Mechanical Properties  
Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Non-Crystalline Solids, 2005, 卷号: 351, 页码: 3671-3676
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
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PECVD制备a-C:H:N薄膜的微观结构研究 期刊论文
电子显微学报, 2004, 卷号: 23, 期号: 4, 页码: 431
Authors:  郝俊英;  徐洮;  李红轩;  刘维民;  刘惠文
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