PECVD制备a-C:H:N薄膜的微观结构研究

	PECVD制备a-C:H:N薄膜的微观结构研究
Department	固体润滑国家重点实验室
	郝俊英; 徐洮; 李红轩; 刘维民; 刘惠文
	2004
Source Publication	电子显微学报
ISSN	1000-6281
Volume	23 Issue:4 Pages:431
Subject Area	材料科学与物理化学
Funding Organization	国家自然科学基金资助项目(No. 50172052;50323007);国家863项目(2003AA305670);中国科学院百人计划资助项目
Language	中文
Document Type	期刊论文
Identifier	http://ir.licp.cn/handle/362003/7045
Collection	固体润滑国家重点实验室（LSL）
Corresponding Author	徐洮
Recommended Citation GB/T 7714	郝俊英,徐洮,李红轩,等. PECVD制备a-C:H:N薄膜的微观结构研究[J]. 电子显微学报,2004,23(4):431.
APA	郝俊英,徐洮,李红轩,刘维民,&刘惠文.(2004).PECVD制备a-C:H:N薄膜的微观结构研究.电子显微学报,23(4),431.
MLA	郝俊英,et al."PECVD制备a-C:H:N薄膜的微观结构研究".电子显微学报 23.4(2004):431.

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