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Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
Authors:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(553Kb)  |  Favorite  |  View/Download：95/1  |  Submit date：2015/10/19
Argon Ion Beam Assisted Magnetron Sputtering  Boron-doped A-si:h Thin Film  Dark Conductivity