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Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering 期刊论文
Surface & Coatings Technology, 2009, 卷号: 203, 页码: 1537-1543
Authors:  逄显娟;  石雷;  王鹏;  张广安;  刘维民
Adobe PDF(1447Kb)  |  Favorite  |  View/Download：345/1  |  Submit date：2012/11/13
Magnetron Sputtering  Ti–al–c FIlms  Mechanical Properties  Tribological Behaviors  
The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films 期刊论文
Surface and Coatings Technology, 2008, 卷号: 202, 页码: 2684-2689
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张君英);  Wang LP(王立平);  Zhang JY(张俊彦)
Adobe PDF(1278Kb)  |  Favorite  |  View/Download：126/2  |  Submit date：2013/03/28
Al-containing Hydrogenated Amorphous Carbon  Magnetron Sputtering  Applied Substrate Pulse Bias  Hardness  Wear Test