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Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content 期刊论文
Surface & Coatings Technology, 2013, 卷号: 235, 页码: 326-332
Authors:  Wang JJ(王军军);  Pu JB(蒲吉斌);  Zhang GA(张广安);  Wang LP(王立平);  Wang LP(王立平)
Adobe PDF(1481Kb)  |  Favorite  |  View/Download：348/8  |  Submit date：2013/12/03
Silicon-doped Diamond-like Carbon Film  Hollow Cathode Plasma ImmersIon Ion implantatIon Method  Tribological Property  Mechanical Property