| Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content | |
| Department | 固体润滑国家重点实验室 |
Wang JJ(王军军)1,2; Pu JB(蒲吉斌)1 ; Zhang GA(张广安)1; Wang LP(王立平)1; Wang LP(王立平)
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| 2013 | |
| Source Publication | Surface & Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 235Pages:326-332 |
| Abstract | Diamond-like carbon (DLC) films have been extensively studied over the past decades due to their unique combination of properties; in particular, silicon-doped DLC (Si-DLC) films are of significant interest for tribological effects. But there are contradictory reports in the literature with regard to the effect of silicon content on the properties of DLC films. In this study, Si-DLC films were deposited by hollow cathode plasma immersion ion implantation (HCPIII) method, using mixtures of C2H2, Ar and diluted SiH4 (SiH4/Ar 10:90). The influences of Si addition on the surface morphology, structure, mechanical and tribological properties were investigated by a combination of surface analysis methods, nanomechanical and friction measurements. It was observed that addition of Si into DLC films lead to a decrease in the Raman band intensity ratio I-D/I-G. The root mean square values of Si-DLC films were increased along with the increase of Si concentration. Both the hardness and elastic modulus suffered degradation when the silicon concentration was low, but these properties recovered when Si concentration increased. The Si-DLC film with tensile stress and compressive stress can be obtained by choosing distinct contents of Si in the film. The coefficient of friction (COF) of Si-DLC films against GCr 15 steel ball under atmosphere firstly increased as the Si concentration increased up to 8.41 at.%, then COF of Si-DLC films decreased with a further increase of Si concentration. The mismatch in the bond length, the difference of the mechanical property and the alteration of the colliding particles' energy were determined to be the basis for the changes in these properties. |
| Keyword | Silicon-doped Diamond-like Carbon Film Hollow Cathode Plasma ImmersIon Ion implantatIon Method Tribological Property Mechanical Property |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.surfcoat.2013.07.061 |
| Funding Organization | the National Natural Science Foundation of China (grant no. 11172300) |
| Indexed By | SCI |
| If | 2.199 |
| Language | 英语 |
| Funding Project | 低维材料摩擦学课题组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4360 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Wang LP(王立平) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
| Recommended Citation GB/T 7714 | Wang JJ,Pu JB,Zhang GA,et al. Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content[J]. Surface & Coatings Technology,2013,235:326-332. |
| APA | Wang JJ,Pu JB,Zhang GA,Wang LP,&王立平.(2013).Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content.Surface & Coatings Technology,235,326-332. |
| MLA | Wang JJ,et al."Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content".Surface & Coatings Technology 235(2013):326-332. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 王军军-surf-2013.pdf（1481KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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