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Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD 期刊论文
Journal of Materials Science, 2008, 卷号: 43, 页码: 645-651
Authors:  Ding J(丁军);  Hao JY(郝俊英);  Xue QJ(薛群基);  Liu WM(刘维民)
Adobe PDF(518Kb)  |  Favorite  |  View/Download：240/0  |  Submit date：2013/03/28