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Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse 期刊论文
Applied Surface Science, 2015, 卷号: 356, 页码: 695-700
Authors:  Wang J(汪佳);  Cao ZY(曹忠跃);  Pan FP(潘富平);  Wang FG(王富国);  Liang AM(梁爱民);  Zhang JY(张俊彦);  Wang FG(王富国);  Zhang JY(张俊彦)
Adobe PDF(2011Kb)  |  Favorite  |  View/Download：230/4  |  Submit date：2016/01/17
A-c:h Film  Bias Voltage  Microstructure  Mechanical Properties  Tribological Properties