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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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物理学报 [1]
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先进固体润滑膜组 [1]
磨损和表面工程组 [1]
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国家自然科学基金(批... [1]
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刘惠文 [1]
周惠娣 [1]
徐洮 [1]
李红轩 [1]
陈建敏 [1]
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2005 [1]
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Creator：陈建敏
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Funding Project：先进固体润滑膜组
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射频功率对类金刚石薄膜结构和性能的影响
期刊论文
物理学报, 2005, 卷号: 54, 期号: 4, 页码: 1885-1889
Authors:
李红轩
;
徐洮
;
陈建敏
;
周惠娣
;
刘惠文
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Submit date：2014/03/03
等离子增强化学气相沉积
类金刚石薄膜
射频功率
结构和性能
Plasma-enhanced Chemical Vapor Deposition
Diamond-like Carbon Films
Rf Power
Structure And Properties
