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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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功能材料 [1]
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Indexed By：EI\&CSCD
Funding Organization：国家自然科学基金资助项目(51065001)
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Ｎ2 流量对中频非平衡磁控溅射ＴｉＡｌＮ薄膜结构及性能的影响
期刊论文
功能材料, 2013, 卷号: 44, 期号: 1, 页码: 32-35
Authors:
吴劲峰
;
何乃如
;
邱孟柯
;
吉利
;
李红轩
;
黄小鹏
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Submit date：2013/12/10
磁控溅射
Tialn 薄膜
N2 流量
微观结构
硬度
Magnetron Sputtering
Tialn Films
Nitrogen Flow
Microstructure
Hardness
