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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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羰基合成与选择氧化国... [1]
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李敏 [1]
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基于PDMS微模具表面性能调控的陶瓷软刻蚀成形
学位论文
理学博士, 北京: 中国科学院大学
Authors:
李敏
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Submit date：2020/10/29
陶瓷微器件
软刻蚀
微模具
PDMS表面改性
Ceramic microcomponents
Soft lithography
Micromolds
PDMS surface modification
