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离子束流密度和基底温度对TiN纳米薄膜性能的影响 期刊论文
材料科学与工程学报, 2005, 卷号: 23, 期号: 4, 页码: 534-536
Authors:  梁爱民;  徐洮;  王立平;  林义民;  孙蓉
Adobe PDF(154Kb)  |  Favorite  |  View/Download：271/1  |  Submit date：2014/03/03
Tin薄膜  离子束辅助沉积  结合强度  纳米硬度  摩擦学性能  Tin Film  Ion Beam Aided depositIon  Bonding Strength  Hardness  Tribological Properties  
The effects of negative bias and flux ratio on the properties of TiN thin films formed by filtered cathodic arc plasma technique 期刊论文
Acta metallurgica sinica, 2005, 卷号: 18, 期号: 3, 页码: 369-374
Authors:  Zhang YJ(张玉娟);  Yan PX(阎鹏勋);  Wu ZG(吴志国);  Zhang WW(张伟伟);  Wang J(王君);  Xue QJ(薛群基)
Adobe PDF(737Kb)  |  Favorite  |  View/Download：197/0  |  Submit date：2014/03/03
Tin  Filtered Cathodic Arc Plasma  Preferred Orientation