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一种CrN/Cr/Si3N4/Cr多层耐磨耐蚀薄膜材料及其制备方法 专利
专利类型: 发明, 专利号: 201310544712.5, 申请日期: 2017-03-29, 公开日期: 2015-05-20
Inventors:  胡明;  伏彦龙;  刘维民;  翁立军;  杨军;  王德生;  高晓明;  姜栋;  孙嘉奕
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The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering 期刊论文
Applied Surface Science, 2014, 卷号: 313, 页码: 563-568
Authors:  Hu M(胡明);  Gao XM(高晓明);  Weng LJ(翁立军);  Sun JY(孙嘉奕);  Liu WM(刘维民);  Hu M(胡明);  Liu WM(刘维民)
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Multilayer Film  Solid Lubricant  Hardness  Tribological Properties