The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering | |
Department | 先进润滑与防护材料研究发展中心 |
Hu M(胡明); Gao XM(高晓明); Weng LJ(翁立军); Sun JY(孙嘉奕); Liu WM(刘维民); Hu M(胡明); Liu WM(刘维民) | |
The second department | 固体润滑国家重点实验室 |
2014 | |
Source Publication | Applied Surface Science |
ISSN | 0169-4332 |
Volume | 313Pages:563-568 |
Abstract | The Ag/Cu nanoscaled multilayer films, which had a constant thickness of Ag layer (about 15 nm) and various thicknesses of Cu layer from about 4 to 20 nm, have been deposited by magnetron sputtering technique. The phase composition, microstructure, surface topography and mechanical properties of these films were investigated, respectively. XRD results revealed that both Ag and Cu layers in multilayer films had a polycrystalline fcc structure with preferred growth of (1 1 1) orientation. The crystallite sizes decreased greatly compared with that of pure Ag film. High-resolution TEM analysis indicated that the multilayers exhibited obvious interfaces between Ag and Cu layers and had dense and columnar grain morphology. AFM analysis showed that all the multilayers with various thicknesses of Cu layers were much smoother than their constituent Ag and Cu pure films. As compared to that of pure Ag (1.7 GPa) and Cu (2.1 GPa) films, as well as, the hardness values calculated from the rule-of-mixtures, a remarkable increase of hardness was observed for all the multilayer films. The maximum hardness value of 4.3 GPa was obtained for the multilayer film with about 20 nm Cu layer. The vacuum ball-on-disk tribotest results suggested that the multilayer film with highest hardness showed a slight decrease in friction coefficient and notable increase in wear resistance. Especially, these results about mechanical and tribological properties were discussed as a function of the film microstructure. |
Keyword | Multilayer Film Solid Lubricant Hardness Tribological Properties |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.apsusc.2014.06.023 |
Funding Organization | the National Natural Science Foundation of China (Grant No. 51305427) |
Indexed By | SCI |
If | 2.711 |
Language | 英语 |
Funding Project | PVD润滑薄膜材料组;空间润滑材料组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/20711 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Hu M(胡明); Liu WM(刘维民) |
Affiliation | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
Recommended Citation GB/T 7714 | Hu M,Gao XM,Weng LJ,et al. The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering[J]. Applied Surface Science,2014,313:563-568. |
APA | Hu M.,Gao XM.,Weng LJ.,Sun JY.,Liu WM.,...&刘维民.(2014).The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering.Applied Surface Science,313,563-568. |
MLA | Hu M,et al."The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering".Applied Surface Science 313(2014):563-568. |
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