The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering
Department先进润滑与防护材料研究发展中心
Hu M(胡明); Gao XM(高晓明); Weng LJ(翁立军); Sun JY(孙嘉奕); Liu WM(刘维民); Hu M(胡明); Liu WM(刘维民)
The second department固体润滑国家重点实验室
2014
Source PublicationApplied Surface Science
ISSN0169-4332
Volume313Pages:563-568
AbstractThe Ag/Cu nanoscaled multilayer films, which had a constant thickness of Ag layer (about 15 nm) and various thicknesses of Cu layer from about 4 to 20 nm, have been deposited by magnetron sputtering technique. The phase composition, microstructure, surface topography and mechanical properties of these films were investigated, respectively. XRD results revealed that both Ag and Cu layers in multilayer films had a polycrystalline fcc structure with preferred growth of (1 1 1) orientation. The crystallite sizes decreased greatly compared with that of pure Ag film. High-resolution TEM analysis indicated that the multilayers exhibited obvious interfaces between Ag and Cu layers and had dense and columnar grain morphology. AFM analysis showed that all the multilayers with various thicknesses of Cu layers were much smoother than their constituent Ag and Cu pure films. As compared to that of pure Ag (1.7 GPa) and Cu (2.1 GPa) films, as well as, the hardness values calculated from the rule-of-mixtures, a remarkable increase of hardness was observed for all the multilayer films. The maximum hardness value of 4.3 GPa was obtained for the multilayer film with about 20 nm Cu layer. The vacuum ball-on-disk tribotest results suggested that the multilayer film with highest hardness showed a slight decrease in friction coefficient and notable increase in wear resistance. Especially, these results about mechanical and tribological properties were discussed as a function of the film microstructure.
KeywordMultilayer Film Solid Lubricant Hardness Tribological Properties
Subject Area材料科学与物理化学
DOI10.1016/j.apsusc.2014.06.023
Funding Organizationthe National Natural Science Foundation of China (Grant No. 51305427)
Indexed BySCI
If2.711
Language英语
Funding ProjectPVD润滑薄膜材料组;空间润滑材料组
compositor第一作者单位
Citation statistics
Cited Times:13[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/20711
Collection中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
固体润滑国家重点实验室(LSL)
Corresponding AuthorHu M(胡明); Liu WM(刘维民)
AffiliationChinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
Recommended Citation
GB/T 7714
Hu M,Gao XM,Weng LJ,et al. The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering[J]. Applied Surface Science,2014,313:563-568.
APA Hu M.,Gao XM.,Weng LJ.,Sun JY.,Liu WM.,...&刘维民.(2014).The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering.Applied Surface Science,313,563-568.
MLA Hu M,et al."The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering".Applied Surface Science 313(2014):563-568.
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