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Properties of TiN/TiCN multilayer films by direct current magnetron sputtering 期刊论文
Journal of Physics D: Applied Physics, 2012, 卷号: 45, 期号: 9, 页码: 095303(1-9)
Authors:  Zheng JY(郑建云);  Hao JY(郝俊英);  Liu XQ(刘小强);  Liu WM(刘维民);  Hao JY(郝俊英)
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等离子体增强化学气相沉积法制备非晶氮化碳薄膜及其性能研究 学位论文
: 中国科学院研究生院, 2006
Authors:  郝俊英
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A-cnxh 薄膜  Pecvd  硬度  弹性模量  耐热耐蚀性  摩擦磨损行为  A-cnxh Films  Hardness And Elastic Modulus  Thermal Stability And Corrosion-resistant Properties  Friction And Wear Behavior