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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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中国科学院材料磨损与... [2]
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磨损与表面工程课题组 [2]
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吴艳霞 [1]
王林青 [1]
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2014 [2]
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Funding Project:磨损与表面工程课题组
Document Type:学位论文
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非晶碳基复合薄膜的真空摩擦机理及延寿研究
学位论文
: 中国科学院大学, 2014
Authors:
吴艳霞
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Submit date:2014/11/25
非晶碳薄膜
软硬交替多层膜
纳米复合膜
真空摩擦学性能
Amorphous Carbon Film
Soft-hard Alternated Multilayer Film
Nanocomposite Film
Vacuum Tribological Properties
磁控溅射制备氢化硅薄膜及其特性研究
学位论文
: 中国科学院大学, 2014
Authors:
王林青
Adobe PDF(6254Kb)
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Submit date:2014/11/25
氢化硅薄膜
磁控溅射
辅助离子束
磷掺杂
硼掺杂
Hydrogenated Si Thin Films
Magnetron Sputtering
Assisted Ion Beam
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