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The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films 期刊论文
Surface and Coatings Technology, 2008, 卷号: 202, 页码: 2684-2689
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张君英);  Wang LP(王立平);  Zhang JY(张俊彦)
Adobe PDF(1278Kb)  |  Favorite  |  View/Download：128/2  |  Submit date：2013/03/28
Al-containing Hydrogenated Amorphous Carbon  Magnetron Sputtering  Applied Substrate Pulse Bias  Hardness  Wear Test  
Structure evolution and mechanical properties enhancement of Al/AlN multilayer 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 8835-8840
Authors:  Zhang GA(张广安);  Wu ZG(吴志国);  Wang MX(王明旭);  Fan XY(范晓彦);  Wang J(王君);  Yan PX(阎鹏勋)
Adobe PDF(869Kb)  |  Favorite  |  View/Download：85/0  |  Submit date：2013/11/01
Magnetron Sputtering  Al/aln Multilayer  Structure  Hardness  Wear Properties