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| Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文 Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155 Authors: Hao JY(郝俊英); Xu T(徐洮); Zhang JY(张俊彦); Liu WM(刘维民); Liu WM(刘维民) Adobe PDF(522Kb)  |  Favorite  |  View/Download:173/1  |  Submit date:2014/12/23 |
| Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文 Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302 Authors: Hao JY(郝俊英); Xu T(徐洮); Liu WM(刘维民); Liu WM(刘维民) Adobe PDF(295Kb)  |  Favorite  |  View/Download:201/1  |  Submit date:2014/12/23 Carbon Nitride Films Pecvd Composition Mechanical Properties |
| Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文 Journal of Non-Crystalline Solids, 2005, 卷号: 351, 页码: 3671-3676 Authors: Hao JY(郝俊英); Xu T(徐洮); Liu WM(刘维民); Liu WM(刘维民) Adobe PDF(173Kb)  |  Favorite  |  View/Download:218/1  |  Submit date:2014/12/23 |
| PECVD制备a-C:H:N薄膜的微观结构研究 期刊论文 电子显微学报, 2004, 卷号: 23, 期号: 4, 页码: 431 Authors: 郝俊英; 徐洮; 李红轩; 刘维民; 刘惠文 Adobe PDF(58Kb)  |  Favorite  |  View/Download:187/3  |  Submit date:2014/12/23 |