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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [4]
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刘维民 [4]
徐洮 [4]
郝俊英 [4]
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Creator:xutao分徐洮
Creator:刘维民
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Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD
期刊论文
Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155
Authors:
Hao JY(郝俊英)
;
Xu T(徐洮)
;
Zhang JY(张俊彦)
;
Liu WM(刘维民)
;
Liu WM(刘维民)
Adobe PDF(522Kb)
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Submit date:2014/12/23
Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system
期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors:
Hao JY(郝俊英)
;
Xu T(徐洮)
;
Liu WM(刘维民)
;
Liu WM(刘维民)
Adobe PDF(295Kb)
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Submit date:2014/12/23
Carbon Nitride Films
Pecvd
Composition
Mechanical Properties
Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD
期刊论文
Journal of Non-Crystalline Solids, 2005, 卷号: 351, 页码: 3671-3676
Authors:
Hao JY(郝俊英)
;
Xu T(徐洮)
;
Liu WM(刘维民)
;
Liu WM(刘维民)
Adobe PDF(173Kb)
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Submit date:2014/12/23
PECVD制备a-C:H:N薄膜的微观结构研究
期刊论文
电子显微学报, 2004, 卷号: 23, 期号: 4, 页码: 431
Authors:
郝俊英
;
徐洮
;
李红轩
;
刘维民
;
刘惠文
Adobe PDF(58Kb)
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Submit date:2014/12/23