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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [2]
中国科学院材料磨损与... [2]
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张俊彦 [2]
张斌 [2]
强力 [2]
王健 [2]
高凯雄 [2]
王雄伟 [1]
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中文 [2]
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2018 [3]
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具高功率脉冲离子源的磁控溅射装置
专利
专利类型: 发明专利, 专利号: ZL201510708221.9, 申请日期: 2018-06-29,
Inventors:
张斌
;
张俊彦
;
高凯雄
;
强力
;
王健
Adobe PDF(109Kb)
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View/Download：65/0
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Submit date：2018/11/27
阳极场辅磁控溅射镀膜装置
专利
专利类型: 发明专利, 专利号: ZL201510704469.8, 申请日期: 2018-06-12,
Inventors:
张斌
;
张俊彦
;
高凯雄
;
强力
;
王健
Adobe PDF(89Kb)
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View/Download：41/0
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Submit date：2018/11/27
反应磁控溅射制备AlN薄膜及其耐腐蚀性能研究
学位论文
工学硕士, 北京: 中国科学院大学, 2018
Authors:
王雄伟
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Submit date：2019/10/31
反应磁控溅射
AlN薄膜
腐蚀
极化曲线
电化学阻抗谱
Reactive magnetron sputtering
AlN film
Corrosion
Polarization curve
Electrochemical impedance spectroscopy
