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磁控溅射制备氢化硅薄膜及其特性研究 学位论文
: 中国科学院大学, 2014
Authors:  王林青
Adobe PDF(6254Kb)  |  Favorite  |  View/Download：378/1  |  Submit date：2014/11/25
氢化硅薄膜  磁控溅射  辅助离子束  磷掺杂  硼掺杂  Hydrogenated Si Thin Films  Magnetron Sputtering  Assisted Ion Beam  P-doping  B-doping  
Improving the tribological performance of a-C:H film in a high vacuum by surface texture 期刊论文
Journal of Physics D: Applied Physics, 2014, 卷号: 47, 期号: 23, 页码: 235301(1-11)
Authors:  Song H(宋惠);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Zhou HD(周惠娣);  Liu L(刘流);  Chen JM(陈建敏);  Ji L(吉利);  Chen JM(陈建敏)
Adobe PDF(5212Kb)  |  Favorite  |  View/Download：382/4  |  Submit date：2014/11/24
A-c:h Films  Surface Texture  High Vacuum  Wear Life  Friction And Wear Mechanism