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Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system 期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
Authors:  Hao JY(郝俊英);  Liu WM(刘维民);  Xue QJ(薛群基)
Adobe PDF(201Kb)  |  Favorite  |  View/Download：272/2  |  Submit date：2013/11/01
Films And Coatings  Chemical Vapor Deposition  Plasma Deposition  Vapor Phase Deposition  Hardness  Indentation  Microindentation  Microstructure  Ftir Measurements  Xps  
Structrure and tribological properties of Ag films deposited at low temperature 期刊论文
Vacuum, 2007, 卷号: 81, 页码: 997-1002
Authors:  Weng LJ(翁立军);  Sun JY(孙嘉奕);  Hu M(胡明);  Gao XM(高晓明);  Xue QJ(薛群基)
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Low-temperature Deposition  Ag Film  Structure  Tribological Properties