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The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles 期刊论文
Surface & Coatings Technology, 2012, 卷号: 206, 期号: 19-20, 页码: 3961-3969
Authors:  Lv YH(吕艳红);  Ji L(吉利);  Liu XH(刘晓红);  Li HX(李红轩);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Li HX(李红轩)
Adobe PDF(1880Kb)  |  Favorite  |  View/Download：752/1  |  Submit date：2013/07/12
Craln Films  Microstructure Hardness  Thermal Stability  
氮气流量对中频非平衡反应磁控溅射制备CrAlN薄膜性能的影响 期刊论文
中国表面工程, 2011, 卷号: 24, 期号: 4, 页码: 7-12
Authors:  吕艳红;  孔庆花;  吉利;  李红轩;  刘晓红;  陈建敏;  周惠娣
Adobe PDF(1174Kb)  |  Favorite  |  View/Download：347/0  |  Submit date：2012/09/24
磁控溅射  Craln 薄膜  微观结构  硬度  腐蚀  Magnetron Sputtering  Craln Film  Microstructre  Hardness  Corrosion