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Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering 期刊论文
Applied Surface Science, 2011, 卷号: 257, 期号: 无期, 页码: 2269-2274
Authors:  Kong QH(孔庆花);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(921Kb)  |  Favorite  |  View/Download：221/2  |  Submit date：2012/09/24
Crnx FIlms  Medium Frequency Magnetron Sputtering  N2 Content  Microstructure  Mechanical Properties  Tribological Properties  
氮气流量对中频非平衡反应磁控溅射制备CrAlN薄膜性能的影响 期刊论文
中国表面工程, 2011, 卷号: 24, 期号: 4, 页码: 7-12
Authors:  吕艳红;  孔庆花;  吉利;  李红轩;  刘晓红;  陈建敏;  周惠娣
Adobe PDF(1174Kb)  |  Favorite  |  View/Download：346/0  |  Submit date：2012/09/24
磁控溅射  Craln 薄膜  微观结构  硬度  腐蚀  Magnetron Sputtering  Craln Film  Microstructre  Hardness  Corrosion  
Influence of substrate bias voltage on the microstructure and residual stress of CrN films deposited by medium frequency magnetron sputtering 期刊论文
Materials Science and Engineering B, 2011, 卷号: 176, 页码: 850-854
Authors:  Gong QH(巩清华);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(519Kb)  |  Favorite  |  View/Download：295/3  |  Submit date：2012/09/24
Crn FIlms  Medium Frequency Magnetron Sputterin  Substrate Bias Voltage  Microstructure  Residual Stress