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Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering 期刊论文
Surface and Coatings Technology, 2014, 卷号: 240, 页码: 419-424
Authors:  Jiang JL(姜金龙);  Wang Q(王琼);  Huang H(黄浩);  Wang YB(王玉宝);  Zhang X(张霞);  Hao JY(郝俊英);  Jiang JL(姜金龙)
Adobe PDF(778Kb)  |  Favorite  |  View/Download:193/3  |  Submit date:2014/12/17
A-c:h Films  Mf Magnetron Sputtering  Substrate Rotation  Microstructure And Property  
钛硅共掺杂类金刚石碳膜的设计、制备及其超低摩擦性能研究 学位论文
: 中国科学院研究生院, 2011
Authors:  姜金龙
Adobe PDF(4220Kb)  |  Favorite  |  View/Download:364/0  |  Submit date:2012/11/07
类金刚石碳膜  钛硅共掺杂  协同作用  微结构  超低摩擦  Diamond-like Carbon Film  Tisi Co-doping  Synergistic Effects  Microstructures  Superlow Friction