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Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C: H Films Prepared through Magnetron Sputtering Deposition 期刊论文
Journal of Nanomaterials, 2015, 页码: 194308(1-9)
Authors:  Liu XQ(刘小强);  Hao JY(郝俊英);  Yang, Hu;  Lin, Xiuzhou;  Zeng, Xianguang
Adobe PDF(4684Kb)  |  Favorite  |  View/Download：134/2  |  Submit date：2015/11/23
纳米复合含氢非晶碳薄膜的制备、结构与性能研究 学位论文
: 中国科学院大学, 2013
Authors:  刘小强
Adobe PDF(5188Kb)  |  Favorite  |  View/Download：443/1  |  Submit date：2014/04/30
磁控溅射  含氢非晶碳薄膜  掺杂技术  纳米结构  超低摩擦  Magnetron Sputtering  Hydrogneated Amorphous Carbon Film  Doping Technique  Nanostructure  Superlow Friction